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AMAG7 HARhole, 1.0 µm depth, SiO2 on Si, C60P120 anchor target
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AMAG7 HARhole, 1.5 µm depth, SiO2 on Si, C60P120 anchor target
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AMAG7 Hardmask Holes, 100 nm depth SiO2 on Si, C60P120 anchor target
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AMAG7 Hardmask LineSpace, 100 nm depth, L50P100 anchor target
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AMAG7 GI-SAXS Striplet, Hardmask LineSpace 70 nm depth, L40P100 anchor target
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AMAG6 HARhole, 1.0 µm depth, SiO2 on Si, C60P120 anchor target
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Faux Test Product
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Cu CMP on AMAG7 Hardmask LineSpace
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W CMP on AMAG7 Hardmask LineSpace
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Chip-AMAG7 Hardmask LineSpace, 100 nm depth, L50P100 anchor target
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Chip-AMAG7 Hardmask LineSpace, 100 nm depth, L50P100 anchor target w/TiN anti-charge coating
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Chip-AMAG7 HARhole, 1.0 µm depth, SiO2 on Si, C60P120 anchor target
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