About Us

AMAG nanometro provides products and services to the semiconductor metrology sector:

  • AMAG wafer nanofoundry provides an off-shelf source of critical path test wafers/artifacts.
  • AMAG SimuSEM is a software solution for scanning electron microscopy (SEM) simulation and electron beam interactions with solids.
  • AMAG offers consulting services related to the above.

AMAG Nanometro is based in Schenectady, New York, USA. The company's original name was AMAG Consulting, LLC.

Benjamin Bunday

Benjamin Bunday, the late founder of AMAG Nanometro, was a semiconductor metrology sector authority and enabler. Ben received his BS in Engineering Physics from The University of Tulsa, and his MS/ABD in Materials Science and Engineering from Cornell University. His career spanned over 25 years in semiconductor metrology, including 15 years leading SEMATECH’s well-known Advanced Metrology Advisory Group (AMAG), which provided to the industry CD, defect and films metrology specification-definition, benchmarking, evaluation, development, roadmapping and guidance efforts. Of particular note, Ben led the development of AMAG test wafers, and the specification and validation of NIST’s JMONSEL. Ben later worked at GlobalFoundries and aBeam Technologies, which gave him additional exposure to metrology’s practices and needs of the industry. After SEMATECH ceased operations in most technical areas in 2015 (including metrology), industry voices called for re-establishing a source for critical metrology infrastructure that SEMATECH AMAG had provided. In response, Ben founded AMAG Consulting LLC (later named AMAG Nanometro) to leverage the valuable assets from SEMATECH AMAG's earlier efforts, and to continue to enable metrology sector progress. Ben was also actively involved with the metrology chapter of the IRDS, and he was a member the programming committee of SPIE’s Metrology conference. Ben was author or coauthor of over 145 papers. Ben passed away in 2024.

Ben's published papers and articles.

Shari Klotzkin

Shari Klotzkin is Simulations Director. She received her BS in Mechanical Engineering from Rutgers University, an MS and Degree of Engineer in Mechanical Engineering from Stanford University, and a PhD in Aerospace Engineering from University of Southern California.  She was awarded an NSF Graduate Fellowship in 1991. Her PhD thesis, titled "Large Eddy Simulation of Turbulent Convection", and subsequent post-doc at Penn State studying simulations of atmospheric turbulence gave her significant experience with numerical solutions of partial differential equations.

Douglas Patriarche

Douglas Patriarche is Chief Software Engineer. He holds a B.Sc.Eng, in Computer Engineering from Queen’s University in Kingston, Ontario. Doug has over 30 years of experience in software engineering and technical management on real-time critical software in telecom systems, medical devices, and scientific computing.

Yvette Ball

Yvette Ball is Wafer Product Manager and Software Test Engineer. She holds a BS in Biochemistry from California State University in Long Beach, CA and has over 30 years of experience in semiconductor process engineering, and in etch and photolithography. With 23 years emphasis in CD Metrology as main CD-SEM process metrologist, Yvette was module owner for the primary CD-SEM systems and metrology practices at Rockwell/Conexant, and also Group Leader of Etch Engineering and at Tower/Jazz in Newport Beach, CA. Yvette managed and developed metrology best practices, calibration wafers and CD-SEM BKMs for their fab's development and production processes, in a full-service production foundry environment.