SimuSEM Use Cases

hop SimuSEM Software Intro Charging Videos

SimuSEM is very flexible, capable of valuable simulation support in many roles:

  • Virtual metrology / application exploration & understanding
  • Metrology Gaps / Limits / Feasibility studies
  • Fundamental understanding of signal generation
  • Model Based Metrology algorithm development
  • Hybrid metrology comparisons involving SEM
  • Faux image generation for AI training
  • SEM imaging condition optimization
  • Calibration of analytical models
  • HV-SEM/Overlay exploration
  • Ability to quantitatively study detailed profile influences on SEM signal, or any/all of the stochastic components involved in roughness measurement, key industry knowledge gaps

Key Use Case: Cost Reduction of Metrology and Inspection Ownership

Organizations using SimuSEM can achieve an increase in metrology/inspection throughput, reduction of production cycle-time, and an overall improvement in process control by optimizing current metrology and inspection recipes. SimuSEM is a virtual SEM that can improve metrology and defect inspection by resolving issues, optimizing, and assisting with new recipe creations without adding to cycle time, for a small fraction of the cost of the purchase of another metrology tool.

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