Coming of Age in Computational SEM

AMAG nanometro presented a paper "Coming of Age in Computational SEM" at the ASMC Conference on May 14th 2024.


Systemic selection of optimized SEM parameters for complex cases or requiring quantitative discrimination is still elusive, yet is becoming more important as materials issues, feature volumes & architectural complexity become more challenging.
Such experimental DOE work is time-consuming & expensive in terms of tool time, and often uncertain with ever-imperfect reference samples.
Such solutions are very dependent on the exact measurement situation. Accurate simulations can save much tool time, achieve more conclusive results, and avoid confusion resulting from experimentation using poorly characterized samples.
Computational SEM is large-scale virtual simulation with validated physical accuracy, now attainable, for systematic parametric exploration of complex SEM problems. Read more 

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